Last updated on: October 24, 2025
| Wednesday, October 29, 2025 | ||
| Time | Event | Venue - Building 10W |
| 07:30-18:00 | Registration | 2F Foyer of Conference Room 4-7 |
| 09:00-09:10 | Opening Remarks | 2F Conference Room 4-7 |
| 09:10-12:30 | Tutorials | 2F Conference Room 4-7 |
| 12:30-13:30 | Lunch Break | 2F Foyer of Conference Room 4-7 |
| 13:30-16:50 | Tutorials | 2F Conference Room 4-7 |
| 16:50-17:00 | Closing Remarks | 2F Conference Room 4-7 |
| Thursday, October 30, 2025 | ||
| Time | Event | Venue - Building 12W |
| 07:30-18:30 | Registration | 1F Foyer of Conference Area |
| 08:00-08:20 | Opening Remarks | 1F Grand Hall A & B |
| 08:20-08:50 | Keynote Speech | 1F Grand Hall A & B |
| 08:50-10:15 | Session 1: FEOL CMP | 1F Grand Hall A & B |
| 10:15-10:45 | Coffee Break & Exhibition | 1F Function Hall & Pre-function Area |
| 10:45-12:10 | Session 2: BEOL CMP | 1F Grand Hall A & B |
| 12:10-13:00 | Lunch Break & Exhibition | GF The Grand |
| 13:00-14:45 | Session 3: Post CMP Cleaning | 1F Grand Hall A & B |
| 14:45-15:15 | Coffee Break & Exhibition | 1F Function Hall & Pre-function Area |
| 15:15-17:25 | Session 4: 3D ICs/TSV/Packaging Applications | 1F Grand Hall A & B |
| 17:25-18:30 | Poster Session 1 | 1F Foyer of Conference Area |
| 18:30-19:30 | Welcome Reception | GF Atrium Link of 10W |
| Friday, October 31, 2025 | ||
| Time | Event | Venue - Building 12W |
| 07:30-18:30 | Registration | 1F Foyer of Conference Area |
| 08:00-08:30 | Keynote Speech | 1F Grand Hall A & B |
| 08:30-9:55 | Session 5: Equipment, Process Control and Metrology | 1F Grand Hall A & B |
| 09:55-10:00 | Next Year ICPT Introduction | 1F Grand Hall A & B |
| 10:00-10:25 | Coffee Break & Exhibition | 1F Function Hall & Pre-function Area |
| 10:25-11:50 | Session 6: CMP Consumables | 1F Grand Hall A & B |
| 11:50-12:10 | Award Ceremony | 1F Grand Hall A & B |
| 12:10-13:00 | Lunch Break & Exhibition | GF The Grand |
| 13:00-14:45 | Session 7: Substrate Polishing such as Si, SiC, GaN and Diamond | 1F Grand Hall A & B |
| 14:45-15:15 | Coffee Break & Exhibition | 1F Function Hall & Pre-function Area |
| 15:15-17:00 | Session 8: CMP Fundamentals, Modeling and Simulation | 1F Grand Hall A & B |
| 17:00-18:10 | Poster Session 2 | 1F Foyer of Conference Area |
| 18:10-21:00 | Banquet |
Meet up at the Registration Desk Oriental Pearl Cruise Bauhinia Harbour Cruise |
| Saturday, November 1, 2025 | ||
| Time | Event | Venue - Building 12W |
| 08:00-12:30 | Registration | 1F Foyer of Conference Area |
| 08:00-9:25 | Session 9: BEOL CMP & Defects, reliability issues and Post CMP cleaning | 1F Grand Hall A & B |
| 09:25-9:55 | Coffee Break & Exhibition | 1F Function Hall & Pre-function Area |
| 9:55-11:20 | Session 10: 3D ICs/TSV/Packaging Applications | 1F Grand Hall A & B |
| 11:20-11:30 | Student Paper Award | 1F Grand Hall A & B |
| 11:30-11:40 | Closing Remarks | 1F Grand Hall A & B |
| 11:40-13:30 | Lunch Break & Exhibition | GF The Grand |
The map of HKSTP
The floor plan of Building 10W
The floor plan of Building 12W
